Dev merge modules part2 (#4776)

* add logsoftmax module

* add sigmoid module

* add maskedfill module

* format

* add unsquuze module

* add eq module

* add arange module

* fix arange module

* add softmax module

* refine

* update logsoftmax module

* update eq module

* update eq module

* refine

* refine according to comments

* refine softmax test case

* fix unsqueeze module

* refine according to comments

* refine

* format

* format

Co-authored-by: Yinggang Wang <wyg19970408@gmail.com>
Co-authored-by: Xiaoyu Zhang <35585791+BBuf@users.noreply.github.com>
Co-authored-by: oneflow-ci-bot <69100618+oneflow-ci-bot@users.noreply.github.com>